3D Printing by Two‐Photon Polymerization of Polyimide Objects and Demonstration of a 3D‐printed Micro‐Hotplate

Polyimides are highly valued in aerospace, biomedical, and microsystems engineering due to their exceptional thermal, chemical, and mechanical stability. However, conventional manufacturing techniques like molding and subtractive machining struggle to produce complex three-dimensional geometries at the micro-scale, with existing polyimide 3D printing methods typically restricted to resolutions of several hundred micrometers. This research addresses these limitations by demonstrating sub-micrometer resolution 3D printing of polyimide objects using two-photon polymerization (2PP) via direct laser writing. The methodology utilizes a negative photosensitive polyimide commonly applied in microsystems. To validate the structural integrity and thermal stability of the printed structures, a micro-hotplate was fabricated and characterized under active thermal loads. The experimental results demonstrated

stable operation at temperatures exceeding 300 °C, confirming the material's compatibility with high-temperature micro-device applications. For M.Tech researchers, this work provides a foundation for investigating the thermomechanical behavior of 2PP-printed polymers, optimizing laser writing parameters, and modeling heat transfer in micro-scale additive components.

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